JET Co., Ltd.

FEATURES

• The system has the clean unit installed
• The droplet measuring is accurate (within ±10%)
  The droplet collection is efficient (90% and over)
• The maximum amount of the droplet is 200μl
  (the figures depend on the liquid composition)
• The collecting performance level is 10atons/cm2
  (for 8-inch wafers), from AAS analysis (the figures
  depend on the liquid composition)

• The scanning is available in any intended range by changing the mode setting
• A retainer will be used for each wafer, to prevent cross-contamination
• The system has CE mark