BW series 3000/2000
FEATURES
- Increased throughput
Selection of High Speed LD/ULD(I-Type)
(MAX≦500 wafer/h with 300mm wafers) - Smaller footprint
- Reduced CoO
OTHER FEATURES
- Air flow control
- Complete standardization
(Stabilized performance, Reduced Set Up time) - SEMI Standard
- SECS/GEM compliant
- EES(EDA or TDI) compliant
